Platinum in the form of NPs is homogeneously distributed in a carbon support structure due to the simultaneous deposition of both the C-matrix and the Pt-NPs during the process. Wiebke a 3 postes sur son profil. Meier, J. C.; Galeano, C.; Katsounaros, I.; Witte, J.; Bongard, H. J.; Topalov, A. High pressures and low carrier gas flow rates enable a morphology transition from CNWs to nanoflakes. Er wird für Unternehmen in der Krise sowohl beratend mit einem Schwerpunkt auf gesellschaftsrechtliche Themen als auch in der Insolvenzverwaltung tätig. Sie benutzen eine veraltete Version des Internet Explorers, was zu Darstellungsfehlern auf unserer Website führen kann. During his legal training, he focused on venture capital. Ins­be­son­de­re für Ge­schäfts­füh­rer ei­ner Ge­sell­schaft ist ei­ne ver­läss­li­che Me­tho­de zur Be­stim­mung der Zah­lungs­un­fä­hig­keit un­ver­zicht­bar. Consultez le profil complet sur LinkedIn et découvrez les relations de Benjamin, ainsi que des emplois dans des entreprises similaires. K2SO4) from Radiometer Analytical with an electrode potential of 680 mV vs NHE (measured by us) was used as the reference electrode. See the complete profile on LinkedIn and discover Martin’s connections and jobs at similar companies. Both of these phenomena and the improved electrochemical stability (see section “Electrochemically active surface area and long-term stability”) support the assumption that the Pt-NPs are embedded in the carbon matrix. The highest ECSA is found for sample CV2 and is approximately 1.5 times higher than that of the commercial catalyst. Aleksei Yu. ; Zhao, N.; Fang, B.; Li, H.; Bi, X. T.; Wang, H. Haxhiaj, I.; Tigges, S.; Firla, D.; Zhang, X.; Hagemann, U.; Kondo, T.; Nakamura, J.; Marzun, G.; Barcikowski, S. Shao-Horn, Y.; Sheng, W. C.; Chen, S.; Ferreira, P. J.; Holby, E. F.; Morgan, D. Kohsakowski, S.; Streubel, R.; Radev, I.; Peinecke, V.; Barcikowski, S.; Marzun, G.; Reichenberger, S. Yu, F.; Liu, M.; Ma, C.; Di, L.; Dai, B.; Zhang, L. Liu, Y.; Zhang, L.; Willis, B. G.; Mustain, W. E. Li, Y.; Gao, W.; Ci, L.; Wang, C.; Ajayan, P. M. Hiramatsu, M.; Kondo, H.; Hori, M. Graphene Nanowalls. In unserer, CMS setzt keine Cookie-basierte Analyse oder Tracking auf unserer Website ein. in unserer Website integriert sind. The precursor was evaporated at a constant temperature of 128 °C, and argon flow was used to carry the precursor into the reaction zone of the plasma. View the profiles of professionals named "Sebastian Wozniak" on LinkedIn. With an increasing addition of hydrogen, the Pt loading of the catalyst also increases. Technische Cookies sind notwendig, damit die Website einwandfrei funktioniert und damit sie den Rechtsvorschriften und den Sicherheitsstandards entspricht. However, as the AST continues, the Pt/CNW samples quickly overtake the commercial catalyst. ; licensee Beilstein-Institut. Ana M. tiene 7 empleos en su perfil. Accepted 05 Sep 2020, 2The hydrogen and fuel cell center (ZBT GmbH), Carl-Benz-Straße 201, 47057 Duisburg, Germany Even though the surface-to-volume ratio can be drastically increased by the use of nanoparticles instead of thin films, the amount of noble metal (usually platinum group metals) required for electrode materials produced by conventional synthesis approaches is still cost-inefficient for broader commercial application [4,5]. This can be explained by the aforementioned removal of carbon at the Pt-NPs surface and slower degradation of the Pt/CNW catalysts as observed in Figure 8. The high xc values found at high gas velocities (high platinum loadings, see Table 1 and Table 2), indicate that the growth of the Pt-NPs does not occur in the gas phase but on the surface of the CNWs since nanoparticle growth in the gas phase should result in smaller particle sizes at high gas velocities (thus shorter residence time of the NP in the plasma), which is not the case here. Schematic illustration of the deposition process. The material deposition was mainly done on 1 × 1 cm2 silicon substrates. Zobrazte si úplný profil na LinkedIn a objevte spojení uživatele Jindřich a pracovní příležitosti v podobných společnostech. Table 1: Traditional multistep synthesis methods for Pt/C catalysts use supports, which are partially graphitized for reaching the required high electrical conductivity and durability. peter’s education is listed on their profile. The transparency register in AML directive, The private placement of equity securities. The license is subject to the Beilstein Journal of Nanotechnology terms and conditions: (https://www.beilstein-journals.org/bjnano). Other elemental signals besides carbon, oxygen, or platinum were not detected, which is expected, as the precursor Pt(acac)2 only consists of these elements and hydrogen. Furthermore, during the first 500 cycles, the ECSA of samples CV1 and CV2 increases (see Figure 8), which likely results from the uncovering of partially carbon-coated Pt surfaces due to carbon corrosion during these cycles. Weight percentages of Pt, C, and O of samples processed at different carrier gas flow rates and a constant substrate temperature of 350 °C without the addition of hydrogen gas measured by XPS. Er wird für Unternehmen in der Krise sowohl beratend mit einem Schwerpunkt auf gesellschaftsrechtliche Themen als auch in der Insolvenzverwaltung tätig. The asymmetric line shape of elemental Pt [40] and the double peak splitting of 3.33 eV [41] was taken from bulk samples in the literature. The chamber pressure, argon carrier gas flow rate, substrate temperature, and gas composition were adjusted, as stated in the Results and Discussion section. XPS a) survey and elemental scans of b) the slightly oxidized sample P7 and c) the highly oxidized sample P6. There are 70+ professionals named "Sebastian Wozniak", who use LinkedIn to exchange information, ideas, and … The reduction of the density of the CNWs results from the etching of the CNWs at the initial nucleation step by atomic hydrogen, effectively reducing the nucleation sites. If the two GCEs were found to be almost identical (in terms of wall density, defect number/type, hybridization, and chemical composition), one of them was used in the CV (samples are designated as CV1–CV3). Während seiner Ausbildung lag sein Schwerpunkt im Bereich Venture Capital. The porosity of the support can be observed in the dark-field TEM micrograph (Figure 2b) and has been reported to be beneficial in electrocatalysis, as it reduces mass transport limitations and increases the surface area [20]. The plasma properties were monitored in situ by optical emission spectroscopy (see Supporting Information File 1). In theory, the process would allow for functionalization of the carbon support or the deposition of technologically relevant nonprecious or alloyed metal catalysts to further improve long-term stability and cost-effectiveness [36]. Mette har 9 job på sin profil. An electron acceleration voltage of 200 kV was used. The deposition experiments are performed in an inductively coupled plasma-enhanced chemical vapor deposition system excited by 13.56 MHz radio frequency (RF). The presented synthesis method can be generalized for the deposition of many other metal/CNW hybrids by choosing the appropriate metal acetylacetonate. Unsere internationalen Teams verstehen die Details Ihres Geschäfts- und Arbeitsumfelds. The degree of oxidation of only the Pt-NPs does not change significantly with hydrogen addition (within an estimated margin of error of ±10%). Tigges, S.; Wöhrl, N.; Radev, I.; Hagemann, U.; Heidelmann, M.; Nguyen, T. B.; Gorelkov, S.; Schulz, S.; Lorke, A. Beilstein J. Nanotechnol. Consequently, with careful adjustment of both the hydrogen concentration and the substrate temperature, the CNW morphology and the platinum loading can be tailored independently. Raman spectroscopy was performed with green laser excitation (532 nm) in a Renishaw confocal inVia Raman microscope, and the spectra were evaluated using the method of Eckmann et al. The utilization (calculated ECSA divided by theoretical ECSA of smooth, round particles) is approximately 33%, 59%, 18% and 65% for CV1, CV2, CV3 and HiSPEC4000, respectively. [32]. Submit your original research! In unserer Cookie-Richtlinie, die Bestandteil unserer Datenschutzerklärung ist, wird im Detail erklärt, wie und warum wir Cookies einsetzen. В профиле участника Alexey указано 7 мест работы. At an elevated substrate temperature, similar effects occur (P10 vs P12 vs P11). Raaj Shikhar has 3 jobs listed on their profile. View Anthony Wright’s profile on LinkedIn, the world’s largest professional community. Comparable results were previously reported by Cho et al. Table 3: Such a narrow PSD, in combination with a small particle size, is essential to reach high mass activities in catalysis [22,23]. The other one was weighed with the mass comparator five times for reproducibility and afterward wiped clean of any remaining catalyst layer and weighed again, as a mass comparator can only measure a difference in mass with high accuracy (±1 µg), yielding the absolute catalyst mass. ORR mass activities were measured at 1600 rpm in oxygen-saturated 0.1M HClO4 at 25 °C and determined at 0.9 V vs NHE. Karl J. J. Mayrhofer, Tairzhan Karabassov, Furthermore, since surfactants (capping agents) are typically applied in the traditional wet chemical synthesis of metal nanoparticles in order to control their morphology and size, additional surface activation steps are necessary to remove these organic molecules from the particle surface (reactivation) [6-8], which often further increases production costs. профиль участника Alexey Lisikhin в LinkedIn, крупнейшем в мире сообществе специалистов. Figure 3: Wenn Sie in Deutschland unternehmerisch tätig sind oder Geschäftsbeziehungen unterhalten und eine Rechtsberatung benötigen, sind wir die richtigen Ansprechpartner, auch bei grenzüberschreitenden Angelegenheiten. Genauere Informationen zu den eingesetzten Tools finden Sie in unserer Datenschutzerklärung. Hence, these supports often require additional functionalization steps for avoiding metal particle agglomeration, which reduces the electrical conductivity and durability of the support. View Marius Rosenberg’s profile on LinkedIn, the world’s largest professional community. At high gas velocities, more Pt can reach the substrate, as at lower gas velocities Pt is already deposited in the silica glass tube leading from the oven to the deposition chamber. Sebastian joined CMS in 2016. A.; Baldizzone, C.; Mezzavilla, S.; Schüth, F.; Mayrhofer, K. J. J. Tigges, S.; Wöhrl, N.; Hagemann, U.; Ney, M.; Lorke, A. Bo, Z.; Yang, Y.; Chen, J.; Yu, K.; Yan, J.; Cen, K. Santhosh, N. M.; Filipič, G.; Tatarova, E.; Baranov, O.; Kondo, H.; Sekine, M.; Hori, M.; Ostrikov, K.; Cvelbar, U. Lehmann, K.; Yurchenko, O.; Melke, J.; Fischer, A.; Urban, G. Garlyyev, B.; Kratzl, K.; Rück, M.; Michalička, J.; Fichtner, J.; Macak, J. M.; Kratky, T.; Günther, S.; Cokoja, M.; Bandarenka, A. S.; Gagliardi, A.; Fischer, R. A. Liu, Y.; Zhang, L.; Willis, B. G.; Mustain, W. E. Zhu, M.; Wang, J.; Holloway, B. C.; Outlaw, R. A.; Zhao, X.; Hou, K.; Shutthanandan, V.; Manos, D. M. Kondo, S.; Kawai, S.; Takeuchi, W.; Yamakawa, K.; Den, S.; Kano, H.; Hiramatsu, M.; Hori, M. Wang, J.; Zhu, M.; Outlaw, R. A.; Zhao, X.; Manos, D. M.; Holloway, B. C. Bo, Z.; Yu, K.; Lu, G.; Wang, P.; Mao, S.; Chen, J. Cho, H. J.; Kondo, H.; Ishikawa, K.; Sekine, M.; Hiramatsu, M.; Hori, M. Suzuki, S.; Chatterjee, A.; Cheng, C.-L.; Yoshimura, M. Ghosh, S.; Ganesan, K.; Polaki, S. R.; Ravindran, T. R.; Krishna, N. G.; Kamruddin, M.; Tyagi, A. K. Kimata, T.; Kakitani, K.; Yamamoto, S.; Yamaki, T.; Terai, T.; Nakamura, K. G. Shao-Horn, Y.; Sheng, W. C.; Chen, S.; Ferreira, P. J.; Holby, E. F.; Morgan, D. Enz, T.; Winterer, M.; Stahl, B.; Bhattacharya, S.; Miehe, G.; Foster, K.; Fasel, C.; Hahn, H. Wang, Y.-J. Benjamin a 3 postes sur son profil. EDS (Oxford Instruments), in combination with an aberration-corrected transmission electron microscope (TEM; JEOL 2200FS), was used to analyze the chemical composition and to record high-resolution micrographs at a sub-nanometer level. The respective cyclic voltammograms of the samples mentioned in Figure 7 and Figure 8 are given in Supporting Information File 1, Figures S7–10. Figure 8: After years of development, conventional synthesis methods still have problems meeting the requirements for scalability of the synthesis and long-term stability of the resulting catalyst. In. The ECSA results show that not only the Pt particle size but also the morphology of the entire Pt/CNW structure plays a significant role – the highest ECSA and utilization are obtained for the Pt/CNW layer with the most dense structure (shorter CNWs), most likely resulting from improved contact between the Pt particles and the liquid electrolyte. Figure 1: However, this does not affect the results for the significantly improved long-term stability of the Pt/CNW catalyst discussed in the following. As the precursor molecule provides much more carbon than platinum, the reduction in platinum loading likely results from a significant increase in the CNW growth and nucleation rate with substrate temperature (see Figure 4c) above the capability of the surrounding to provide sufficient Pt for embedding. See the complete profile on LinkedIn and discover Marius’ connections and jobs at similar companies. Genauere Informationen zu den eingesetzten Tools finden Sie in unserer, Öffentliches Wirtschaftsrecht & Vergaberecht, Stuttgart - Steuerberatungsgesellschaft GmbH, Datenschutzrecht & Recht der IT-Sicherheit, Gerichtliche und außergerichtliche Streitbeilegung, Regulatorische und steuerliche Compliance, Gerichtliche und außergerichtliche Vertretung, Öffentliches Bau- und Planungsrecht, Projektentwicklung, Öffentliches Wirtschaftsrecht & Vergaberecht anzeigen, Private Equity & Venture Capital anzeigen, TMC - Technology, Media & Communications anzeigen, CMS berät Allianz Real Estate beim Ankauf von Londoner Bürogebäuden im Wert von über 440 Millionen Euro, CMS begleitet Spiegel-Institut-Gruppe bei Übernahme durch Rhein Invest, CMS berät NORD/LB bei Neuausrichtung der Banksteuerung, Presse- und Medienkontakte in Deutschland, Die 10. Cost-efficiency, durability, and reliability of catalysts, as well as their operational lifetime, are the main challenges in chemical energy conversion. Alaswad, A.; Baroutaji, A.; Achour, H.; Carton, J.; Al Makky, A.; Olabi, A. G. Rath, R.; Kumar, P.; Mohanty, S.; Nayak, S. K. Li, Y.; Sun, Y.; Qin, Y.; Zhang, W.; Wang, L.; Luo, M.; Yang, H.; Guo, S. Esmaeilifar, A.; Rowshanzamir, S.; Eikani, M. H.; Ghazanfari, E. Lopez-Sanchez, J. See the complete profile on LinkedIn and discover Raaj Shikhar’s connections and jobs at similar companies. The wall density, as well as the growth rate, was found to increase with increasing gas flow rate, decreasing pressure and increasing substrate temperature, which agrees with a previous study [17]. These degradation processes can be avoided by increasing interparticle distance (at the expense of the electrochemically active surface) or by creating barriers to prevent NP agglomeration (i.e., highly porous supports) [16]. Aquí tienes un anticipo de lo que los miembros de LinkedIn opinan sobre Tanja: “ Tanja is a highly motivated and independently working person who constantly overachieved the tasks given to her. Figure 4 shows the influence of the carrier gas flow rate (a), pressure (b), and substrate temperature (c) on the CNW morphology. Sitzungscookies werden nur für die Dauer Ihres Besuchs gespeichert und nach dem Schließen Ihres Internetbrowsers wieder von Ihrem Gerät gelöscht. Angel A. Topalov, View Sebastian Lutz’s profile on LinkedIn, the world’s largest professional community. After 2000 accelerated stress test (AST) cycles, the most durable Pt/CNW layers still retain 50–70% of their maximum ECSA, while the commercial catalyst only has 30% left. Sie ermöglichen Ihnen außerdem das Einloggen in personalisierte Bereiche sowie den Zugriff auf die Tools von Drittanbietern, die ggf. Im Profil von Sebastian Tigges sind 7 Jobs angegeben. Paul has 8 jobs listed on their profile. Michael Niermann is a senior partner at the law firm and a special counsel for labour law, specialised in all questions ranging from the first job interview to the negotiation of termination solutions or litigation. Tommy har angett 6 jobb i sin profil. A one-step, single-source approach for the deposition of Pt/CNW hybrid materials using plasma-enhanced chemical vapor deposition is presented. The precursor flow rate was determined as constant at approimately 0.1 ± 0.01 sccm, which was found by weighing the amount of precursor before and after each synthesis using a high precision scale. This project was co-financed by the European Union with funds from the European Regional Development Fund (Grant number: EFRE-0800630). Zobrazte si profil uživatele Jindřich Koranda na LinkedIn, největší profesní komunitě na světě. Therefore, the support surface is characterized by a low density of binding sites for anchoring Pt-NP, on which the Pt-NPs can then easily diffuse. View Jeff Dolphin’s profile on LinkedIn, the world's largest professional community. TIGGES Rechtsanwälte und Steuerberater Partnerschaft mbB Zollhof 8 40221 Düsseldorf info(at)tigges.legal Tel. Even though the exact position of the Pt-NPs is difficult to determine by projective imaging (such as TEM), ultrahigh resolution TEM images prove the formation of embedded Pt-NPs in the carbon matrix by resolving individual carbon layers, which are affected by the Pt-NP. Wenn Sie individuell entscheiden möchten, welche Cookies wir setzen dürfen, klicken Sie bitte unten auf „Cookie-Einstellungen“. Wir setzen diese Cookies ein, um die Mischung der Kommunikationswege zu optimieren, über die wir Ihnen unsere Inhalte zukommen lassen. Ferdi Schüth and For details on the experimental procedures, see the Experimental section. Deutschland | 562 followers on LinkedIn. Consultez le profil complet sur LinkedIn et découvrez les relations de Wiebke, ainsi que des emplois dans des entreprises similaires. These very low absolute catalyst masses are difficult to handle in inductively-coupled plasma mass spectrometry and prone to high measurement errors. Jeff has 3 jobs listed on their profile. At moderate Pt loading (7.6 wt %), the substrate temperature does not have any influence on Pt loading (not shown here). Table 2: In contrast, low carrier gas flow rates and moderate to high pressures (small absolute gas velocities) resulted in substantial oxidation of the Pt-NPs in the layer, as can be seen when comparing sample P6 to P2. The RF power was kept constant at 500 W (load power) and the processing time was 50 min if not stated otherwise. View Sebastian Wendland’s profile on LinkedIn, the world's largest professional community. Kuzin, A typical histogram of the Pt-NPs is shown in Figure 2c, displaying a narrow PSD with a geometric standard deviation [21] between 1.24 and 1.3. However, these approaches typically require multiple-step procedures in which the support and catalytic nanoparticles (NPs) are first produced individually and then combined in a third step (i.e., NP sedimentation in liquid phase [13] or the supercritical CO2 method [14]) to form the required electrocatalyst [6]. Even though parts of the embedded Pt-NPs may not be in contact with the liquid electrolyte during CV, a sufficient ECSA and utilization were obtained. Even though XPS is a surface-sensitive technique (to a depth of ≈5 nm), we are confident that this method gives a reasonable estimate of the absolute Pt loading used in the ECSA calculation, since the thickness of the well-separated CNWs is in this range (typically <5 nm). Andrey S. Vasenko, © 2020 Tigges et al. A PHI Versaprobe II instrument was used to record XPS survey scans over a binding energy range of 0–1200 eV, and detailed elemental scans in the regions associated with C1s (≈284 eV), O1s (≈532 eV), N1s (≈400 eV), Pt4f (≈71 eV), Si2p (≈100 eV) and the Auger transition of CKVV (≈1220 eV). Marie Heitzmann, The degree of oxidation of only the Pt-NPs (mainly Pt(OH)2) of individual samples is shown in parentheses under the Pt weight loading. Garlyyev, B.; Kratzl, K.; Rück, M.; Michalička, J.; Fichtner, J.; Macak, J. M.; Kratky, T.; Günther, S.; Cokoja, M.; Bandarenka, A. S.; Gagliardi, A.; Fischer, R. A. Lehmann, K.; Yurchenko, O.; Melke, J.; Fischer, A.; Urban, G. Kadetov, V. A. Diagnostics and modeling of an inductively coupled radio frequency discharge in hydrogen. No other elements than Pt, C, and O were detected, which was later confirmed by XPS measurements (see Figure 5 a). Bekijk het profiel van Raymond Tieman op LinkedIn, de grootste professionele community ter wereld. Received 14 May 2020, Increasing the H2 concentration in the plasma finally results in the deposition of an amorphous layer (Ar/H2 ≈59, Figure 4d, right panel). The platinum loading and degree of oxidation of the whole Pt/CNW catalyst layers are dependent on the substrate temperature and the addition of hydrogen during synthesis. These measurements confirm that the black dots in the bright field micrographs are indeed Pt-NPs. Even though the influence of the physicochemical properties of Pt/C on its electrochemical characteristics has been extensively studied in the literature [16,23], the unique synthesis method presented here is expected to influence both the electrochemically active surface area (ECSA), oxygen reduction reaction (ORR) mass activites and stability of the catalytically active Pt-NP, due to the aforementioned embedding. Auf LinkedIn können Sie sich das vollständige Profil ansehen und mehr über die Kontakte von Sebastian Tigges und Jobs bei ähnlichen Unternehmen erfahren. A.; Dimitratos, N.; Hammond, C.; Brett, G. L.; Kesavan, L.; White, S.; Miedziak, P.; Tiruvalam, R.; Jenkins, R. L.; Carley, A. F.; Knight, D.; Kiely, C. J.; Hutchings, G. J. Liu, W.; Zhang, H.; Li, C.; Wang, X.; Liu, J.; Zhang, X. Miller, P. A.; Hebner, G. A.; Greenberg, K. E.; Pochan, P. D.; Aragon, B. P. Li, Y.; Sun, Y.; Qin, Y.; Zhang, W.; Wang, L.; Luo, M.; Yang, H.; Guo, S. Meier, J. C.; Galeano, C.; Katsounaros, I.; Witte, J.; Bongard, H. J.; Topalov, A. ... Go to LinkedIn. Weight percentages of Pt, C, and O of samples processed at varying substrate temperature and hydrogen addition, and at constant pressure (10.5 Pa) and overall carrier gas flow rate (argon and hydrogen gas; 60 sccm) measured by XPS. An inductively coupled plasma-enhanced chemical vapor deposition process at a substrate temperature as low as 350 °C using platinum acetylacetonate as a single-source precursor was established for the deposition of a Pt/C electrocatalyst. A.; Baldizzone, C.; Mezzavilla, S.; Schüth, F.; Mayrhofer, K. J. J. Enz, T.; Winterer, M.; Stahl, B.; Bhattacharya, S.; Miehe, G.; Foster, K.; Fasel, C.; Hahn, H. Alaswad, A.; Baroutaji, A.; Achour, H.; Carton, J.; Al Makky, A.; Olabi, A. G. Rath, R.; Kumar, P.; Mohanty, S.; Nayak, S. K. Wang, Y.-J. Relative platinum loadings (wt %) as determined by XPS are given in the columns in Figure 7, whilst the absolute platinum loadings were 39.0, 56.5, 17.5, and 20 µg/cm² for CV1, CV2, CV3 and HiSPEC4000, respectively. Unfortunately, there are still many scientific challenges regarding the commercial production of fuel cell catalysts, especially the scarcity of noble metals and the insufficient electrochemical long-term stability. Platinum acetylacetonate was used as a single-source precursor for the deposition of Pt-NPs embedded in the supporting CNW matrix. Local peripheral treatments (LPT), such as radiotherapy or electrochemotherapy, have been shown to modulate systemic immune responses, and preliminary data have raised the hypothesis that … The morphology of the CNWs, the amount of platinum loading as well as the size of the platinum NPs can be precisely adjusted, and Pt-NPs with a mean particle diameter less than 3 nm and a narrow particle size distribution (PSD) with a geometric standard deviation of 1.24–1.3 can be achieved. Therefore, Pt/CNW samples with different physical properties were studied concerning their ECSA, ORR mass activity and long-term stability, and the results were compared to those obtained with a commercially available Pt/C electrocatalyst. Pierre Lecante, A pulsed bias voltage was applied to the substrate holder. Platinum acetylacetonate (98%, abcr GmbH) was placed inside an evaporator at the backside of the chamber, a silica glass tube was fitted to the exhaust of the evaporator that pointed towards the substrate holder, and the reactor chamber was evacuated to <5 × 10−6 mbar before the deposition process.

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